White light interferometers interferoMETER

The innovative white light interferometers from Micro-Epsilon set a benchmark in high-precision distance and thickness measurements. The absolute interferometers enable stable measurement results with sub-nanometer resolution offering a comparatively large measuring range and offset distance. The interferometers are used for absolute distance and thickness measurements of transparent objects and wafers.

Convince yourself: measurement accuracy at the highest level for applications in industry and semiconductor machine building.